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Dr. Pavlo Portnichenko
at KLA MIE GmbH
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 16 September 2022 Paper
High-precision and cost-effective EUV reticle defect registration with integrated grid matching using KLA LMS IPRO and FlashScan
P. Y. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 12325, 123250E (2022) https://doi.org/10.1117/12.2642100
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection
Proceedings Article | 20 October 2021 Presentation + Paper
High-precision and cost-effective EUV reticle defect registration with integrated grid matching using KLA LMS IPRO and FlashScan
P. Portnichenko, F. Oezdogan, L. Dawahre, O. Lohse, B. Kalsbeck, P. Jain, H. Steigerwald, S. Ismail, F. Laske
Proceedings Volume 11855, 1185504 (2021) https://doi.org/10.1117/12.2600957
KEYWORDS: Photomasks, Inspection, Extreme ultraviolet, Metrology, Reticles, Optical alignment, Particles, Manufacturing, Defect inspection, Silicon
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