Dr. Philipp Hüthwohl Profile

Dr. Philipp Hüthwohl

at Carl Zeiss SMT GmbH

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Author

Publications (2)

SPIE Journal Paper | 1 March 2023

Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope

Jens Timo Neumann, Abhilash Srikantha, Philipp Hüthwohl, Keumsil Lee, James William B., Thomas Korb, Eugen Foca, Tomasz Garbowski, Daniel Boecker, Sayantan Das, Sandip Halder

JM3, Vol. 22, Issue 02, 021009, (March 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.021009

KEYWORDS: Defect detection, Education and training, Back end of line, Image restoration, Image classification, Data modeling, Scanning electron microscopy, Process modeling, Machine learning, Electron microscopes

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Proceedings Article | 26 May 2022 Presentation + Paper

Defect detection and classification on imec iN5 node BEoL test vehicle with MultiSEM

Jens Timo Neumann, Abhilash Srikantha, Philipp Hüthwohl, Keumsil Lee, James William B., Thomas Korb, Eugen Foca, Tomasz Garbowski, Daniel Boecker, Sayantan Das, Sandip Halder

Proceedings Volume 12053, 120530I (2022) https://doi.org/10.1117/12.2619766

KEYWORDS: Defect detection, Image classification, Data modeling, Bridges, Back end of line, Visualization, Sensors, Inspection, Semiconductors

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