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Po-Hung Yao
at Industrial Technology Research Institute
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Author
Publications (1)
Proceedings Article | 3 September 2002 Paper
Fabrication of planar blazed grating using laser LIGA
Chi-Feng Chen, Rui-Ting Zheng, Bor-Hong Yao
Proceedings Volume 4907, (2002) https://doi.org/10.1117/12.482276
KEYWORDS: Excimer lasers, Diffraction gratings, Etching, Diffraction, Polymers, Laser ablation, Laser applications, Scanning electron microscopy, Microelectromechanical systems, Micro optics
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