Optical metrology techniques have been widely used in geometric dimension and shape measurements due to many
features such as non-contact measurement, fast measurement speed, digital data format for computerized analysis
and visualization, superior resolution, and high accuracy, etc. Among these techniques, phase-shifting based surface
profilers have drawn more and more attention due to its full-field measurement and maturing wrapping/unwrapping
analysis characteristics. This paper analyzes the error sources in phase-shifting surface profilers, including phaseshifting
generation, non-linearity compensation, phase-shifting algorithms, surface contour extraction, modeling,
and calibration, etc. Some methods to improve the measurement accuracy through coordinate error compensation
are also proposed including transfer functions and look-up table (LUT) methods.
In general, eddy current sensors are point-based sensors with a very high sensitivity but are very slow because of
scanning. Optical visual inspections can be very fast but have difficulty in detection of tiny flaws. Magneto-optical
imaging is a hybrid sensing technique that combines the advantages of both the eddy current sensor and the optical
visual inspection. It has a very high sensitivity and fast inspection speed up to 100mm per second. This paper discusses
the optical system design in a magneto-optical imaging sensor including wavelength selection analysis, image contrast
enhancement option, and frame subtraction, etc. Theoretical analysis is given as well as initial testing results.
This paper discusses issues related to accurate measurement using multiple cameras with phase-shifting techniques. Phase-shifting methods have been widely used in industrial inspections due to high accuracy and excellent tolerance to surface finish. But so far, most such systems use only one camera. In our applications to inspect manufactured part with complex shapes, one camera cannot capture the whole surface because of occlusions, double bounced light, and the limited dynamic range of cameras. Multiple cameras have to be used and the data from different cameras must be merged together. Because different cameras have individual error sources when a part is to be measured, it is a challenge to obtain the same shape, in the same 3D coordinates system from all cameras without data manipulation such as iterative registration. This paper addresses this challenge of data registration. The error sources are analyzed and demonstrated and several paths for error reduction are presented. Experiment results show the significant improvement obtained.
We describe a new algorithm for 3D edge detection on composite part surfaces based upon phase shift analysis. Current phase shift based algorithms generate 3D surface profiles, they do not directly compute 3D edge information. The proposed algorithm has been developed in this context for 3D edge detection. One advantage of this method is its ability to measure smooth 3D edges that cannot be accurately measured using traditional contact techniques. A dense 3D point cloud representing part edges are computed, all such edges in view may be computed simultaneously. The inherent accuracy available with phase shift analysis is leveraged for detecting the smooth edges with minimal error. Experimental results with some test parts are presented.
Projected fringe methods have lead to a wide selection of commercial sensors for 3D measurement applications. The basis of these systems is a projector such as an LCD presentation projector that is used to generate a coarse pattern that is shifted across the part and viewed by a camera. Three or more images with a small pattern shift between each are sufficient to obtain a detailed 3D map using phase shift analysis methods. The limitation of these systems has been that to obtain high resolution the system is limited to viewing only a small field-of-view. Moire methods are a way to leverage this resolution, particularly on flat or only slightly contoured areas. The approach described here takes advantage of moire methods used in connection with the fringe projection method to provide high resolution over key reference areas, while still provided a less precision measurement over a larger region.
Three-dimensional edge measurement is critical in many applications such as blade manufacturing due to the stringent requirements on aerodynamic performance of blades. Optical metrology techniques provide very good tools in terms of speed and accuracy, but face some challenges as well, such as discontinuity, irregularity, and size variation in the edge shape. This paper presents several methods that include stereovision techniques to capture a sharp edge and phase-shifting to capture an edge profile of a blunt edge. For sharp edge measurement with stereovision, multiple cameras are used to view the edge from different directions. Then the captured images are processed to obtain the point cloud of the edge. For blunt edge measurement, a phase-shifting method is applied. After the edge profile is obtained, all edge information can be extracted. In this paper, different illumination methods are discussed and different edges are measured. Experimental data shows that these methods are practical in obtaining accurate edge or edge profile.
In manufacturing, inspection and measurement systems have long been desired to be able to measure as many kinds of parts as possible without treating the surface. Specifically, measuring shiny parts has been a big challenge for optical metrology because of double-bounced light -- a phenomenon that light can be reflected from an area to another on the surface. The unwanted light will result in higher noise and can even make the measured results unacceptable. Traditionally, a polarizer is placed in front of both the light sources and the camera. After properly adjusting the polarizer in front of the camera, the double bounced reflected light can be blocked to some degree while the normally reflected light can go through. By this way, the extra reflections can be reduced but not totally eliminated. This paper presents a new method to totally eliminate double bounced light. Here, color light sources are used to illuminate the part and multiple cameras are used to measure different areas. Each camera views through an appropriate color filter so that only a certain color light is seen. The measured results from all cameras are then merged together to create the complete image. This method is more efficient than the traditional solution that uses polarizers. Both measurement principle and some results are given.
Structured light techniques have been used in a lot of applications. As a two-dimensional optical measurement method, structured light sensors are faster than one-dimensional point triangulation sensor while easier to calibrate and move than full-field three-dimensional sensors. The accuracy of structured light sensors mainly depends on the accuracy of both calibration and beam center extraction. In some applications with complicated surface shapes, the extracted center may not be the actual “true” center, which results in image bias. This paper presents a method to compensate the image bias and improve the measurement accuracy of structured light sensors. The basic concepts of image bias correction are given and some initial results are provided.
A new 3D surface contouring and ranging system based on a digital fringe projection and phase shifting technique is described. In this system, three phase-shifted fringe patterns and a centerline pattern are used to determine the absolute phase map of the object. This phase map is then converted to the absolute x, y, and z coordinates of the object surface by a transformation algorithm. To determine the accurate values of the system parameters as required by the transformation algorithm, a two-step calibration procedure was developed. First the parameters were indirectly measured through experiments to determine their approximate values. Second, a calibration plate whose features were calibrated by a coordinate measuring machine was measured by the system at various positions. An iteration algorithm was then used to estimate the system parameters. Measurements of the calibration plate, a sheet- metal panel, and a Ford master gauge showed results consistent with the actual surface contours of the objects.
A color-encoded fringe projection and phase shifting technique is proposed for rapid 3-D surface contouring applications. A color fringe pattern whose RGB components comprise three phase-shifted fringe patterns is created by software on a computer screen and then projected to an object by a novel computer-controlled digital projection system. The image of the object is captured by a digital camera positioned at an angle different from that of the projection system. The image is then separated into its RGB components, creating three phase-shifted images of the object. These three images are used to retrieve the 3-D surface contour of the object through the use of a phase wrapping and unwrapping algorithm. Only one image of the object is required to obtain its 3-D surface contour. Thus contouring speed, limited only by the frame rate of the camera, can be dramatically increased as compared to that of the traditional phase shifting techniques. The technique is especially useful in applications where the object being contoured is going through quasi-static or dynamic changes. This paper describes the principle of the technique and presents some preliminary experimental results.
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