KEYWORDS: Sensors, Antennas, Long wavelength infrared, Absorption, Dielectrics, Resonators, Infrared sensors, Chemical elements, Signal to noise ratio, Etching
Antenna coupled detectors break the intrinsic tradeoff between signal and noise by “collecting over a large area” and “detecting over a small area”. Most antenna coupled detectors in the infrared rely on a metal resonator structure. However, there are losses associated with metallic structures. We have demonstrated a novel long-wave infrared (LWIR) detector that combines a dielectric resonator antenna with an antimonide-based absorber. The detector consists of a 3D, subwavelength InAsSb absorber embedded in a resonant, cylindrical dielectric resonator antenna made of amorphous silicon. This architecture enables the antimonide detection element to shrink to deep subwavelength dimensions, thereby reducing its thermal noise. It is important to note that this concept only applies when (a) the detector noise is limited by bulk noise mechanisms with negligible surface leakage currents and (b) the dominant source of current in the device is due to dark current (such as diffusion) that scales with the volume of the detector. The dielectric resonator enhances the collection of photons with its resonant structure that couples incident radiation to the detector. We will present results on the absorption in structures with and without the dielectric resonator antenna. The signal to noise enhancement in the LWIR photodiodes integrated with the dielectric resonator antenna using radiometric characterization will be discussed.
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