Dr. Reid A. Brennen Profile

Dr. Reid A. Brennen

Project Scientist at Agilent Technologies Inc

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 26 September 1995 Paper

Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques

Reid Brennen, Michael Hecht, Dean Wiberg, Steven Manion, William Bonivert, Jill Hruby, Marcus Scholz, Timothy Stowe, Thomas Kenny, Keith Jackson, Chantal Khan Malek

Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222650

KEYWORDS: Polymethylmethacrylate, X-rays, Photomasks, Electroplating, Metals, Plating, Gold, Semiconducting wafers, Copper, X-ray imaging

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Proceedings Article | 26 September 1995 Paper

Fine pitch grids for an x-ray solar imaging spectrometer fabricated by optical lithography and XeF2 etching

Reid Brennen, Michael Hecht, Dean Wiberg, Steven Manion, William Bonivert, Jill Hruby, Kristofer Pister, Ezekiel Kruglick

Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222651

KEYWORDS: Gold, Etching, Semiconducting wafers, Silicon, X-rays, Electroplating, Photoresist materials, Photons, Imaging spectroscopy, X-ray imaging

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SPIE Journal Paper | 1 November 1994

Microfabricated optical chopper

Michael Ching, Reid Brennen, Richard White

OE, Vol. 33, Issue 11, (November 1994) https://doi.org/10.1117/12.10.1117/12.181576

KEYWORDS: Camera shutters, Optical choppers, Modulation, Resonators, Etching, Silicon, Microfabrication, Semiconducting wafers, Plasma etching, Sensors

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Proceedings Article | 15 December 1993 Paper

Microfabricated optical chopper

Michael Ching, Reid Brennen, Richard White

Proceedings Volume 1992, (1993) https://doi.org/10.1117/12.165705

KEYWORDS: Camera shutters, Optical choppers, Resonators, Modulation, Microfabrication, Silicon, Etching, Microactuators, Optical lithography, Plasma etching

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