Mr. Ricky Schulze Profile

Ricky Schulze

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Publications (1)

Proceedings Article | 20 June 2021 Presentation + Paper

Vectorial 3D modeling of coherence scanning interferometry

Tobias Pahl, Sebastian Hagemeier, Marco Künne, Corvin Danzglock, Nils Reinhold, Ricky Schulze, Markus Siebert, Peter Lehmann

Proceedings Volume 11783, 117830G (2021) https://doi.org/10.1117/12.2592617

KEYWORDS: 3D modeling, Interferometry, Optical testing, Finite element methods, Device simulation, 3D metrology, Scattering, Polarization, Microscopy, Instrument modeling

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