Dr. Robert J. LeSuer Profile

Dr. Robert J. LeSuer

at Univ of Texas/Austin

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Author

Publications (3)

Proceedings Article | 4 May 2005 Paper

Understanding the photoresist surface-liquid interface for ArF immersion lithography

Will Conley, Robert LeSuer, Frank Fan, Allen Bard, Chris Taylor, Pavlos Tsiartas, Grant Willson, Andrew Romano, Ralph Dammel

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.601482

KEYWORDS: Photoresist materials, Semiconducting wafers, Scintillation, Liquids, Water, Immersion lithography, Polymers, Interfaces, Signal detection, Fluorine

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Proceedings Article | 14 May 2004 Paper

Using scanning electrochemical microscopy to probe chemistry at the solid-liquid interface in chemically amplified immersion lithography

Robert LeSuer, Fu-Ren Fan, Allen Bard, J. Christopher Taylor, Pavlos Tsiartas, Grant Willson, Willard Conley, Gene Feit, Roderick Kunz

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.537527

KEYWORDS: Electrodes, Chemistry, Interfaces, Mercury, Immersion lithography, Platinum, Microscopy, Scanning probe microscopy, Water, Antimony

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Proceedings Article | 14 May 2004 Paper

Implications of immersion lithography on 193-nm photoresists

J. Christopher Taylor, Charles Chambers, Ryan Deschner, Robert LeSuer, Willard Conley, Sean Burns, C. Willson

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535875

KEYWORDS: Water, Photoresist materials, Polymers, Semiconducting wafers, Scintillation, Immersion lithography, Liquids, Refraction, Silicon, Spectroscopic ellipsometry

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