Dr. Roman Sappey Profile

Dr. Roman Sappey

Director of Technology at KLA Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 September 2009 Paper

Optical metrology for template and disk patterned imprints

Roman Sappey, Art Jenkins, Sri Venkataram

Proceedings Volume 7488, 74881X (2009) https://doi.org/10.1117/12.833285

KEYWORDS: Critical dimension metrology, Single crystal X-ray diffraction, Beam propagation method, Magnetism, Process control, Metrology, Nanoimprint lithography, Scatterometry, Manufacturing, Semiconductors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years