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Prof. Seiji Hashimoto
at Gunma Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 April 2010 Paper
Synthesized design of flexible structures for semiconductor manufacturing equipments
S. Hashimoto, M. Konuma, K. Shimosakai, M. Nitta
Proceedings Volume 7522, 75222Y (2010) https://doi.org/10.1117/12.851333
KEYWORDS: Control systems design, Control systems, Vibration control, System identification, Semiconductor manufacturing, Vibration isolation, Systems modeling, Model-based design, Optical isolators, Structural design
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