Mr. Sergey N. Averkin Profile

Sergey N. Averkin

at Institute of Physics and Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 March 2019 Paper

A. Miakonkikh, S. Averkin, K. Rudenko, V. Lukichev

Proceedings Volume 11022, 110221X (2019) https://doi.org/10.1117/12.2522505

KEYWORDS: Etching, Silicon, Plasma, Oxidation, Oxides, Semiconducting wafers, Plasma etching, Photomasks, Oxygen, Fluorine

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Keywords/Phrases