Mr. Sergey K. Golubtsov Profile

Sergey K. Golubtsov

at Institute of Automation and Electrometry of the SB RAS

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Publications (3)

Proceedings Article | 27 November 2023 Poster + Paper

Thermochemical laser writing of chromium grayscale masks and their application for fabrication of multilevel diffractive optical elements

Roman Kuts, Victor Korolkov, Alexander Sametov, Vadim Cherkashin, Daria Zaitseva, Sergey Golubtsov

Proceedings Volume 12768, 1276829 (2023) https://doi.org/10.1117/12.2687589

KEYWORDS: Chromium, Photomasks, Photoresist materials, Transmittance, Diffractive optical elements, Film thickness, Fabrication, Diffraction, Laser applications, Grayscale lithography

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Proceedings Article | 19 December 2022 Poster + Presentation + Paper

Analyzing the tolerances on direct laser writing of two-dimensional Dammann gratings and performing the software correction of writing modes

Victor Korolkov, Andrey Sedukhin, Roman Kuts, Vadim Cherkashin, Sergey Golubtsov, Anatoly Malyshev, Dmitrij Belousov

Proceedings Volume 12318, 123182G (2022) https://doi.org/10.1117/12.2643720

KEYWORDS: Photoresist materials, Diffraction, Tolerancing, Diffraction gratings, Multiphoton lithography, Photomasks, Statistical analysis, Process control, Glasses, Distortion

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Proceedings Article | 12 September 2021 Presentation + Paper

Development of method for measuring a light energy distribution over foci for mould of diffractive component of bifocal intraocular lens

V. Korolkov, P. Konoshenko, S. Mikerin, D. Belousov, A. Malyshev, S. Golubtsov

Proceedings Volume 11873, 118730G (2021) https://doi.org/10.1117/12.2597112

KEYWORDS: Refractive index, Photoresist materials, Diffraction, Silica, Liquids, Diffractive optical elements, Manufacturing, Intraocular lenses, Eye, Polymers

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