Mr. Sergey V. Nefediev Profile

Sergey V. Nefediev

at JSC Molecular Electronics Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 31 January 2022 Paper

E. Polushkin, S. Nefediev, A. Kovalchuk, O. Soltanovich, S. Yu. Shapoval

Proceedings Volume 12157, 1215711 (2022) https://doi.org/10.1117/12.2624184

KEYWORDS: Hydrogen, Silicon, Plasma, Dielectrics, Transistors, Molybdenum, Plasma treatment, Interfaces, Integrated circuits, Semiconducting wafers

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Keywords/Phrases