Dr. Sergii A. Komarov Profile

Dr. Sergii A. Komarov

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 28 August 2003 Paper

High-resolution etching of MoSi using electron beam patterned chemically amplified resist

Mark Mueller, Serguei Komarov, Ki-Ho Baik

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504195

KEYWORDS: Etching, Quartz, Photomasks, Reactive ion etching, Chemistry, Critical dimension metrology, Electron beam lithography, Scanning electron microscopy, Electron beams, Helium

Read Abstract +

Proceedings Article | 1 August 2002 Paper

Dry etching of chrome for photomasks for 100-nm technology using chemically amplified resist

Mark Mueller, Serguie Komarov, Ki-Ho Baik

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.476954

KEYWORDS: Etching, Photomasks, Dry etching, Photoresist processing, Critical dimension metrology, Scanning electron microscopy, Cadmium, Optical proximity correction, Chemically amplified resists, Electron beam lithography

Read Abstract +

Proceedings Article | 19 November 1999 Paper

Using textural features of SAR images for decoding forest regions

Serguet Komarov, D. Lukyanenko, A. Yevtyushkin

Proceedings Volume 3983, (1999) https://doi.org/10.1117/12.370493

KEYWORDS: Neurons, Polarization, Synthetic aperture radar, Image classification, Analytical research, Artificial neural networks, Statistical analysis, Image segmentation, Radar, Radio optics

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years