To meet the semiconductor industry’s demands for accurate measurements on excimer lasers, we have developed a system using the correlation method to measure the nonlinear response of pulse energy detectors of excimer laser at 193 nm. The response of the detector under test to incident laser pulse energy is compared to the corresponding response of a linear monitor detector. This method solves the difficulties caused by large pulse-to-pulse instability of the excimer laser and delivers measurement results with an expanded uncertainty (k=2) of 0.8 %.
A modified ellipsometric optical system has been designed for an in-vitro medical diagnostic instrument using an off- the-shelf 525-nm LED source. System requirements included a 20 degree (+/- 1 deg) incident angle, 1 uW (min) assay surface incident power, 300 um (max) incident spot diameter (full spatial extent) and 500:1 (min) detector S/N in normal room light. The fixed polarization ellipsometric optical analysis method is discussed, and the lens prescription used in a prototype instrument is given. Zemas spot size analyses are given, as well as a theoretical model for S/N assessment. Incident spot size and optical power data are provided which agree with the theory presented. Finally, the application of results and typical scanned signal output are discussed.
We have developed a system for measuring the nonlinearity of optical power meters or detectors over a dynamic range of more than 60 dB at telecommunications wavelengths. This system uses optical fiber components and is designed to accommodate common optical power meters and optical detectors. It is based on the triplet superposition method. The system also measures the range discontinuity between neighboring power ranges or scale settings of the optical power meter. We have developed an algorithm to treat both the nonlinearity and the range discontinuity in a logically consistent manner. Measurements with this system yield correction factors for powers in all ranges. The measurement system is capable of producing results which have standard deviations as low as 0.02%. With slight modification the system can operate over a 90 dB dynamic range at telecommunications wavelengths. This measurement system provides accurate determination of optical power meter or detector nonlinearity; the characterized detectors then can be used for such applications as absolute power and attenuation measurements.
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