CONFERENCE PROCEEDINGS
Advanced Search
Shingo Hayashi
at Hitachi Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 11 April 2019 Paper
Application of aberration corrected low voltage SEM for metrology
Zh. H. Cheng, H. Dohi, S. Hayashi, K. Hirose, H. Kazumi
Proceedings Volume 10959, 1095922 (2019) https://doi.org/10.1117/12.2516017
KEYWORDS: Scanning electron microscopy, Aberration correction, Electron beams, Extreme ultraviolet, Gold, Metrology, Colorimetry, Fin field effect transistors, Monochromatic aberrations, Inspection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top