Mr. Shunsuke Niisaka Profile

Shunsuke Niisaka

at Nikon Corp

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Publications (3)

Proceedings Article | 20 November 2019 Paper

The direct absorption measurement of fused silica, CaF2, MgF2, and sapphire at VUV and IR region

K. Kato, C. Higashimura, S. Niisaka

Proceedings Volume 11173, 111731K (2019) https://doi.org/10.1117/12.2536388

KEYWORDS: Absorption, Sapphire, Silica, Vacuum ultraviolet, Laser irradiation, Transmittance, Magnesium fluoride, Diffractive optical elements, Ultraviolet radiation

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Proceedings Article | 30 December 2008 Paper

Laser durability improvement of deep UV fluoride coatings

Shunsuke Niisaka, Yoshinori Watanabe

Proceedings Volume 7132, 71320H (2008) https://doi.org/10.1117/12.804465

KEYWORDS: Optical coatings, Magnesium fluoride, Deep ultraviolet, Multilayers, Excimer lasers, Laser induced damage, Refractive index, Mirrors, Microscopy, Atomic force microscopy

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Proceedings Article | 30 July 2002 Paper

Development of low-loss optical coatings for 157-nm lithography

Ryuji Biro, Kazuho Sone, Shunsuke Niisaka, Minoru Otani, Yasuyuki Suzuki, Chidane Ouchi, Tadahiko Saito, Masanobu Hasegawa, Jun Saito, Akira Tanaka, Akira Matsumoto

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474550

KEYWORDS: Optical coatings, Lithography, Neodymium, Spectroscopy, Fluorine, Vacuum ultraviolet, Lenses, Transmittance, Absorption, Reflection

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