Mr. Steven Chiou Profile

Steven Chiou

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Proceedings Article | 1 May 2023 Presentation + Paper

AppliedPRO: process recipe optimizer for R&D acceleration and beyond

Deepak Gupta, Sravan Nandakumar, Takemasa Miyagi, Oliver Jan, Waheb Bishara, Steven Chiou, Kyeong-tae Lee, Andre Kim, Sangdoo Kim, Youngje Um, Ki-il Kim, Changbae Park, Myeonggil Shin, Keun Hee Bai

Proceedings Volume 12499, 1249903 (2023) https://doi.org/10.1117/12.2661320

KEYWORDS: Diffractive optical elements, Etching, Visualization, Algorithm development, Logic, Process engineering, Mathematical optimization, Design and modelling, Semiconductors, Semiconducting wafers

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