Dr. Takashi Hasebe Profile

Dr. Takashi Hasebe

at Tokyo Electron Kyushu Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 12 November 2024 Presentation + Paper

Yuqing Jin, Yuko Tsutsui Ito, Takahiro Kozawa, Takashi Hasebe, Kazuo Sakamoto, Makoto Muramatsu

Proceedings Volume 13215, 132150J (2024) https://doi.org/10.1117/12.3032366

KEYWORDS: Polymers, Diffusion, Polymer thin films, Viscosity, Lithography, Quartz, Molecules, Crystals, Standards development, Data modeling

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Keywords/Phrases