Mr. Tao Wu Profile

Tao Wu

at 苏州大学光电学院

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Author

Publications (5)

Proceedings Article | 18 December 2023 Paper

Study on the impact of grating absorption on substrate temperature under intense laser irradiation

Gaoxiang Xu, Chaoming Li, Xinrong Chen, Shuncheng Sun, Jiayao Pan, Tao Wu, Lei Sun

Proceedings Volume 12961, 1296107 (2023) https://doi.org/10.1117/12.3006024

KEYWORDS: Laser irradiation, Light absorption, Optical gratings, High power lasers, Thin films, Temperature distribution, Sapphire, Reflection gratings, Silica, Pulsed laser operation

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Proceedings Article | 18 December 2023 Paper

Research on suppression method of straight edge diffraction effect of mosaic grating

Shuncheng Sun, Xinrong Chen, Chaoming Li, Gaoxiang Xu, Tao Wu, Jiayao Pan, Lei Sun

Proceedings Volume 12961, 1296106 (2023) https://doi.org/10.1117/12.3005771

KEYWORDS: Diffraction, Diffraction gratings, Transmittance, Near field diffraction, Image transmission, Optical gratings

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Proceedings Article | 23 January 2023 Paper

Design of two-dimensional grating for high precision precision machine tool measurement

Tao Wu, Xinrong Chen, Chaoming Li, Jiayao Pan, Shuncheng Sun, Gaoxiang Xu

Proceedings Volume 12556, 125561N (2023) https://doi.org/10.1117/12.2651639

KEYWORDS: Diffraction gratings, Diffraction, Optical design, Precision measurement, Tolerancing, Polarization, Gold, Aluminum, Electromagnetism

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In ultra-precision machining, the precision displacement measurement system is required to ensure the positioning accuracy of the tool and the work-piece, and then to ensure the processing accuracy of the product. The grating displacement measurement system which adopt grating pitch as measurement reference not only has big measurement span and high-resolution advantages but also has strong anti-interference ability. So it is widely used in performance testing of surface processing equipment. The traditional two-dimensional grating measuring system realizes two-dimensional measurement by installing two one-dimensional grating measurement devices in two directions of the two-dimensional platform. It’s easy to introduce the abbe error in this way and obviously a lot of space is occupied. While the micro-displacement measurement system based on the two-dimensional grating can not only obtain the micro-displacement data information of two directions at the same time, but also has high measurement accuracy, small abbe error and compact structure. Two-dimensional grating is the core component of the two-dimensional grating measurement system. In this paper, the design two-dimensional grating is carried out. In the case of vertical incidence of the He-Ne laser with 632.8 nm wavelength, we develop the microstructure design of two-dimensional aluminum-plated and gold-plated grating with periods of 1 micron and 2 microns. Based on the rigorous coupled wave theory (RCWA) and Rsoft software, the following simulation results are obtained. Two-dimensional grating with period of 1 micron has higher diffraction efficiency compared with period of 2 microns. When the duty cycle between 0.43-0.58 and the groove depth between 140nm-200nm, the diffraction efficiency of two-dimensional aluminum grating with period of 1 micron is more than 18%. Although the diffraction efficiency of two-dimensional gold grating with period of 1 micron can also achieve 18%, its tolerance range is very small.

Proceedings Article | 24 November 2021 Paper

Ultra-precision detection of surface defects of large aperture diffraction grating based on machine vision

Haotian Wang, Chaoming Li, Xinrong Chen, Zhe Huang, Jiayao Pan, Tao Wu

Proceedings Volume 12069, 1206910 (2021) https://doi.org/10.1117/12.2606743

KEYWORDS: Diffraction gratings, Image processing, Optical components, Defect detection, Machine vision, Optics manufacturing, Optical design, Image segmentation, Edge detection, Digital signal processing

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Proceedings Article | 24 November 2021 Paper

Grating design for SERS mechanistic studies

Zhe Huang, Xinrong Chen, Chaoming Li, Haotian Wang, Jiayao Pan, Tao Wu

Proceedings Volume 12062, 120620R (2021) https://doi.org/10.1117/12.2606959

KEYWORDS: Silver, Teeth, Absorption, Reflection, Finite-difference time-domain method, Optical design, Surface plasmons, Raman scattering, Diffraction gratings, Silica

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