Mr. Ted L. Taylor Profile

Ted L. Taylor

Senior Engineer at Micron Technology Inc

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Publications (2)

Proceedings Article | 16 April 2010 Paper

Product and tool control using integrated auto macro defect inspection in the photolithography cluster

Ted Taylor, Paul Shirley, David Dixon, Shoichiro Yanagi, Eri Makimura

Proceedings Volume 7638, 763821 (2010) https://doi.org/10.1117/12.846571

KEYWORDS: Semiconducting wafers, Inspection, Thin film coatings, Optical lithography, Defect inspection, Wafer inspection, Coating, Scanners, Contamination, Defect detection

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Proceedings Article | 5 April 2007 Paper

Investigation of optimized wafer sampling with multiple integrated metrology modules within photolithography equipment

Ted Taylor, Eri Makimura

Proceedings Volume 6518, 651822 (2007) https://doi.org/10.1117/12.711572

KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Manufacturing, Software development, Lithium, Manufacturing equipment, Inspection, Process control, Radon

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