Prof. Thierry Delair Profile

Prof. Thierry Delair

at Univ Claude Bernard Lyon 1

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Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Chitosan as a water-based photoresist for DUV lithography

Isabelle Servin, Alexandre Teolis, Arnaud Bazin, Aurélien Sarrazin, Paule Durin, Olha Sysova, Corinne Gablin, Benoît Saudet, Didier Leonard, Olivier Soppera, Jean-Louis Leclercq, Yann Chevolot, Raluca Tiron, Thierry Delair, Stephane Trombotto

Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423

KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

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Proceedings Article | 20 March 2018 Presentation + Paper

Sub-micron lines patterning into silica using water developable chitosan bioresist films for eco-friendly positive tone e-beam and UV lithography

Mathieu Caillau, Céline Chevalier, Pierre Crémillieu, Thierry Delair, Olivier Soppera, Benjamin Leuschel, Cédric Ray, Christophe Moulin, Christian Jonin, Emmanuel Benichou, Pierre-François Brevet, Christelle Yeromonahos, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq

Proceedings Volume 10587, 105870S (2018) https://doi.org/10.1117/12.2292312

KEYWORDS: Biopolymers, Electron beam lithography, Lithography, Optical lithography, Silicon, Silica, Etching, Absorbance, Polymers, Ultraviolet radiation, Polymethylmethacrylate

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