Dr. Ulrike Zeiser Profile

Dr. Ulrike Zeiser

at Carl Zeiss Industrielle Messtechnik GmbH

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Author

Publications (2)

Proceedings Article | 23 August 2023 Presentation

Efficient simulation of microscopic imaging for reconstruction of nanostructures

Phillip Manley, Jan Krüger, Bernd Bodermann, Rainer Köning, Andreas Heinrich, Christian Eder, Aksel Goehnermeier, Ulrike Zeiser, Martin Hammerschmidt, Lin Zschiedrich, Philipp-Immanuel Schneider

Proceedings Volume PC12619, PC126190B (2023) https://doi.org/10.1117/12.2673077

KEYWORDS: Nanostructures, Electron microscopy, Scattering, Diffraction limit, Diffraction, Optical microscopy, Near field optics, Near field, Multilayers, Modeling

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Proceedings Article | 23 August 2023 Presentation

On aberration retrieval for optical microscopes in length metrology

Jan Krüger, Bernd Bodermann, Rainer Köning, Phillip Manley, Lin Zschiedrich, Philipp-Immanuel Schneider, Andreas Heinrich, Christian Eder, Ulrike Zeiser, Aksel Goehnermeier

Proceedings Volume PC12619, PC126190A (2023) https://doi.org/10.1117/12.2672294

KEYWORDS: Optical aberrations, Imaging systems, Optical microscopes, Metrology, Point spread functions, Simulations, Reflection, Quality systems, Polarization, Objectives

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