Dr. Vahagn Sargsyan
at Carl Zeiss SMS
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 16 October 2017 Paper
Guy Russell, David Jenkins, Arosha Goonesekera, Kay Dornbusch, Vahagn Sargsyan, Hendrik Zachmann, Ute Buttgereit
Proceedings Volume 10451, 1045113 (2017) https://doi.org/10.1117/12.2281884
KEYWORDS: Defect detection, Defect inspection, Critical dimension metrology, Image analysis, Image processing, Statistical analysis, Tolerancing, Photomasks, Manufacturing, Reliability

Proceedings Article | 28 June 2013 Paper
Proceedings Volume 8701, 870109 (2013) https://doi.org/10.1117/12.2027883
KEYWORDS: Etching, Quartz, Analytical research, Critical dimension metrology, Process control, Attenuators, Atomic force microscopy, Photomasks, Opacity, Image processing

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