Mr. Valery Plaksin Profile

Valery Plaksin

at JSC Molecular Electronics Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 31 January 2022 Paper

S. Gorokhov, S. Patyukov, V. Plaksin

Proceedings Volume 12157, 121571B (2022) https://doi.org/10.1117/12.2624164

KEYWORDS: Copper, Resistance, Tin, Tantalum, Chemical vapor deposition, Silicon, Semiconducting wafers, Titanium, Diffusion, Remote sensing

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Keywords/Phrases