Dr. Wenhao Chen Profile

Dr. Wenhao Chen

at Hong Kong Univ of Science and Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 March 2023 Presentation

Wenhao Chen, Mingzheng Duan, Hadi Tavakkoli, Huahuang Luo, Wibool Piyawattanametha, Yi-Kuen Lee

Proceedings Volume 12434, 124340I (2023) https://doi.org/10.1117/12.2651330

KEYWORDS: Scanners, 3D modeling, Finite element methods, Etching, Capacitance, Actuators, Reactive ion etching, Oxides, Mirrors, Silicon

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Keywords/Phrases