Dr. William Maudez Profile

Dr. William Maudez

at 3D-Oxides

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 March 2021 Presentation + Paper

Chemical beam vapour deposition technique with Sybilla equipment: review of main results in its 20-year anniversary

Estelle Wagner, William Maudez, Sarunas Bagdzevicius, Cosmin Sandu, Giacomo Benvenuti

Proceedings Volume 11687, 116871Z (2021) https://doi.org/10.1117/12.2591443

Read Abstract +

“Sybilla” equipment has been developed for two decades to propose solutions to the challenges faced by the very promising and expanding field of oxide thin film deposition. The underlying technology named Chemical Beam Vapor Deposition (CBVD) inherits its basic concept from Chemical Beam Epitaxy (CBE), and consists in effusing (in high vacuum conditions) beams of organometallic compounds towards a substrate on which they decompose under energy activation to form the film. The technique enables deposition of multi-element oxides (up to 3 was tested, up to 5 possible), either homogenously or in combinatorial mode (i.e with controlled precursor flow gradient emitted onto the substrate, in good agreement with theoretical model predictions). High homogeneity films can be achieved, even on large substrates (scaling between 150 mm and 450 mm wafer was shown). Precursor decomposition can be initiated either thermally (substrate heating) or by irradiating with energetic beams (laser and electron activations were studied). Additive growth can be obtained by such localized irradiation, or alternatively depositing through shadow masks and benefiting from the line-of-sight nature of the technique (and exploiting the precursor decomposition kinetics not to damage masks). The multi-parameter nature of the deposition technology (precursor nature, different flows, temperature) allows to tune growth rate (from few nm/h to several μm/h) as well as thin film physico-chemical properties (chemical composition, film morphology, crystallinity, etc.) and functional properties. Combinatorial growth reveals a very efficient facility to optimize processes (in one shot, saving time and resources) and address new thin film architectures.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years