CONFERENCE PROCEEDINGS
Advanced Search
Xianglu Dai
at Tsinghua Univ
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 13 November 2014 Paper
High-frequency deformation grating fabrication techniques and applications
Xianglu Dai, Yanjie Li, Huimin Xie
Proceedings Volume 9276, 927625 (2014) https://doi.org/10.1117/12.2074671
KEYWORDS: Electron beam lithography, Fabrication, Holography, Optical lithography, Metals, Deflectometry, Electron beams, Lithography, Nanoimprint lithography, Microscopes
SPIE Journal Paper | 18 November 2013
High-accuracy magnification calibration for a microscope based on an improved discrete Fourier transform
Xianglu Dai, Huimin Xie, Chuanwei Li, Zhu Wu, Hongxia Geng
OE, Vol. 52, Issue 11, 114102, (November 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.11.114102
KEYWORDS: Calibration, Microscopes, Fourier transforms, Scanning electron microscopy, Image processing, Optical engineering, Mechanics, Electron microscopes, Optical microscopes, Chemical species
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top