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Xiao-Jun Li
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Publications (1)
Proceedings Article | 22 October 2010 Paper
Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic system
Xiaojun Li, Xudi Wang, Jian Jin, Xin Li, Yangchao Tian, Shaojun Fu
Proceedings Volume 7657, 76570Z (2010) https://doi.org/10.1117/12.866133
KEYWORDS: Positron emission tomography, Nanolithography, Glasses, Ultraviolet radiation, Quartz, Adhesives, Nanoimprint lithography, Scanning electron microscopy, Photomicroscopy, Silicon
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