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Xiaoya Yu
at The Institute of Survival Technology and Effectiveness Evaluation of Flying Vehicle
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Publications (1)
Proceedings Article | 26 March 2019 Paper
Detection of particle defect components on silicon wafer with laser induced breakdown spectroscopy combined laser cleaning technology
Proceedings Volume 10959, 109592A (2019) https://doi.org/10.1117/12.2511169
KEYWORDS: Particles, Semiconducting wafers, Silicon, Pulsed laser operation, Spectroscopy, Laser applications, Copper, Laser systems engineering
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