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Yanhang Zhang
at Univ of Colorado at Boulder
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 11 July 2002 Paper
Vertical electrostatic actuator with extended digital range via tailored topology
Proceedings Volume 4700, (2002) https://doi.org/10.1117/12.475026
KEYWORDS: Actuators, Electrodes, Gold, Temperature metrology, Packaging, Beam shaping, Optical lithography, Microelectromechanical systems, Surface micromachining, Solids
Proceedings Article | 1 September 2000 Paper
Tolerance and precision study for solder self-assembled MEMS
Kevin Harsh, Paul Kladitis, Yanhang Zhang, Martin Dunn, Victor Bright, Y. Lee
Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397933
KEYWORDS: Assembly tolerances, Microelectromechanical systems, Tolerancing, Gold, Statistical analysis, Optical spheres, Indium, Temperature metrology, Packaging, Directed self assembly
Conference Committee Involvement (1)
MEMS/MOEMS Technologies and Applications III
12 November 2007 | Beijing, China
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