Mr. Yarden Melamed Profile

Yarden Melamed

at Applied Materials Israel Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 30 April 2023 Presentation

Ran Alkoken, Sandip Halder, Hyo Seon Suh, Mor Baram, Gadi Oron, Kasturi Saha, Kevin Houchens, Yarden Melamed

Proceedings Volume 12496, 1249616 (2023) https://doi.org/10.1117/12.2658249

KEYWORDS: Extreme ultraviolet, Stochastic processes, Scanners, Finite element methods

Proceedings Article | 27 April 2023 Presentation + Paper

Bobin Mathew, Shahar Arad, Omri Brand, Tal Frank, Ran Alkoken, Yael Shilo, Yarden Melamed, Rotem Mor Yosef, Hyo Seon Suh, Seonggil Heo, Sandip Halder

Proceedings Volume 12496, 1249607 (2023) https://doi.org/10.1117/12.2658505

KEYWORDS: Line width roughness, Scanning electron microscopy, Semiconducting wafers, Metrology, Stochastic processes, Extreme ultraviolet lithography

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