A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3×106 cycle. The scanning device is designed to meet a confocal microscopy application providing 100 μm×100 μm field of view and <3-μm lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution.
We present a disposable miniaturized confocal imager, consisting mostly of three-dimensional (3-D)-printed components. A 3-D printed laser scanner with 10×10 mm2 frame size is employed for Lissajous scan, with 180 and 315 Hz frequencies in orthogonal directions corresponding to ±8 deg and ±4 deg optical scan angles, respectively. The actuation is done electromagnetically via a magnet attached to the scanner and an external coil. A miniaturized lens with 6-mm clear aperture and 10-mm focal length is 3-D printed and postprocessed to obtain desired (≤λ/5 surface roughness) performance. All components are press-fitted into a 3-D-printed housing having 17 mm width, which is comparable to many of the MEMS-based scanning imagers. Finally, line-scan from a resolution target and two-dimensional scanning in the sample location were demonstrated with the integrated device.
KEYWORDS: Scanners, Confocal microscopy, 3D printing, Laser scanners, 3D scanning, Computer aided design, Imaging systems, 3D metrology, Polishing, Microelectromechanical systems
A low-cost confocal endoscope was developed consisting of a 3D printed laser scanner, a lens, and a housing. The developed tool, mainly made out of low cost polymer offers a disposable use. The scanner unit is overall 10x10mm and electromagnetically actuated in 2-dimensions using a magnet that is attached to the 3D printed scanner and an external miniaturized coil. Using 3D printer’s fabrication advantages the first two vibration modes of the scanner were tailored as out-of-plane displacement and torsion. The scanner employs lissajous scan, with 190 Hz and 340 Hz scan frequencies in the orthogonal directions and we were able to achieve ± 5° scan angles, respectively, with ~ 100 mA drive current. The lens which has 6-mm diameter and 10-mm focal length is 3D printed with Veroclear material and then polished in order to reach optical quality surface. Profilometer (Dektak) measurements indicate only x2 increase in rms roughness, with respect to a commercial glass lens having identical size and focal length.
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