Mr. Yohei Otsuka Profile

Yohei Otsuka

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

SEM imaging of high aspect ratio trench by selectively controlling the electron beam irradiation using photocathode

Yuta Arakawa, Kotaro Niimi, Yohei Otsuka, Daiki Sato, Atsushi Koizumi, Haruka Shikano, Hokuto Iijima, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano

Proceedings Volume 12955, 1295534 (2024) https://doi.org/10.1117/12.3010733

KEYWORDS: Scanning electron microscopy, Electron beams, Feedback control, Signal detection, Semiconductors, Metrology, Scanning

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Proceedings Article | 10 April 2024 Poster + Paper

Photoelectron beam from semiconductor photocathodes leading to new inspection technologies

T. Nishitani, Y. Arakawa, K. Niimi, Y. Otsuka, D. Sato, A. Koizumi, H. Shikano, H. Iijima, Y. Honda, H. Amano

Proceedings Volume 12955, 1295533 (2024) https://doi.org/10.1117/12.3010730

KEYWORDS: Electron beams, Semiconductors, Scanning electron microscopy, Transmission electron microscopy, Laser irradiation, Semiconductor materials, Group III-V semiconductors, Electron microscopes, Vacuum

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Proceedings Article | 27 April 2023 Poster + Paper

Novel electron beam technology using InGaN photocathode for high-throughput scanning electron microscope imaging

Daiki Sato, Atsushi Koizumi, Haruka Shikano, Shotaro Noda, Yohei Otsuka, Daisuke Yasufuku, Kazumasa Mori, Hokuto Iijima, Tomohiro Nishitani, Yoshio Honda, Hiroshi Amano

Proceedings Volume 12496, 1249629 (2023) https://doi.org/10.1117/12.2657032

KEYWORDS: Electron beams, Quantum efficiency, Scanning electron microscopy, Indium gallium nitride, Semiconductors

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