Mr. Yoichi Ose Profile

Yoichi Ose

Senior Manager at Hitachi High-Tech Corp

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Author

Publications (3)

Proceedings Article | 16 July 2002 Paper

Correction method for high-precision CD measurements on electrostatically charged wafers

Yoichi Ose, Makoto Ezumi, Tatsuaki Ishijima, Hideo Todokoro, Kouichi Nagai

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473508

KEYWORDS: Semiconducting wafers, Wafer-level optics, Objectives, Distortion, Electron beams, Optical simulations, Scanning electron microscopy, Optical testing, Silicon, Optics manufacturing

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Proceedings Article | 14 June 1999 Paper

Improved CD-SEM optics with retarding and boosting electric fields

Yoichi Ose, Makoto Ezumi, Hideo Todokoro

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350781

KEYWORDS: Objectives, Selenium, Reflection, Magnetism, Electron beams, Computer simulations, Scanning electron microscopy, Image resolution, Silicon, Optical simulations

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Proceedings Article | 21 May 1996 Paper

Development of critical dimension measurement scanning electron microscope for ULSI (S-8000 series)

Makoto Ezumi, Tadashi Otaka, Hiroyoshi Mori, Hideo Todokoro, Yoichi Ose

Proceedings Volume 2725, (1996) https://doi.org/10.1117/12.240146

KEYWORDS: Scanning electron microscopy, Image resolution, Sensors, Chromatic aberrations, Electron microscopes, Semiconducting wafers, Objectives, Reflectors, Semiconductors, Imaging systems

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