Mr. Yutaka Kanakutsu Profile

Yutaka Kanakutsu

at (Kabu) Nikon Kumagayaseisakusho;Nikon Corp

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Automatic parameter setting for lens aberration control during product lot exposure

Yutaka Kanakutsu, Yukio Koizumi, Hironori Ikezawa, Shigeru Eto, Junji Ikeda, Takenori Takeuchi, Tomoyuki Matsuyama, Edward Stan, Ronald Hiltunen

Proceedings Volume 10961, 109610M (2019) https://doi.org/10.1117/12.2514917

KEYWORDS: Actuators, Reticles, Calibration, Scanners, Wavefronts, Control systems, Deformable mirrors, Distortion, Feedback control, Automatic control

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