Tilted diffraction gratings with highly refractive will be an important element for smart glass to realize a metaverse such as AR (Augmented Reality)/VR (Virtual Reality). Nanoimprinting, which can directly process a variety of materials for a variety of shapes, is well suited for mass production of tilted gratings, and many approaches have been reported. In nanoimprinting, one of the keys is to release the gradient grating shape without defects. In this report, we analyzed the strain generated during peeling release and tear release by computer simulation, and investigated a low-damage peeling method for releasing the tilted structure.
Tilted diffraction gratings with highly refractive will be an important element for smart glass to realize a metaverse such as AR (Augmented Reality)/VR (Virtual Reality). Nanoimprinting, which can directly process a variety of materials for a variety of shapes, is well suited for mass production of tilted gratings, and many approaches have been reported. In nanoimprinting, one of the keys is to release the gradient grating shape without defects. In this report, we analyzed the strain generated during peeling release and tear release by computer simulation, and investigated a low-damage peeling method for releasing the tilted structure.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.