The large-size blade is the core component of nuclear power and ultra-supercritical steam turbine, and its existing dimension detection methods generally have the problems of low detection efficiency or insufficient accuracy. So, an efficient and high-precision measurement technology of full profile based on multi view structured light 3D measurement is proposed in this paper. And several key factors affecting the measurement accuracy are analyzed. Then a highlight elimination technology combining multi view and phase shift is proposed to eliminate the effect of specular on the smooth metal surface of the blade. A non-overlapping point cloud registration method based on feature constraints is presented to solve the difficulty caused by the lack of overlapping point cloud on the thin inlet and outlet edges of blade and other areas. Finally, a platform for the whole profile of large-size turbine blade is constructed to realize the full profile measurement and evaluation of large-size turbine blades. The measurement results show that the full surface point cloud of an about 900mm long blade is completely obtained by the measurement platform, and the measurement accuracy of 70μm is achieved through the comparison test of high-precision gauge blocks and some standard balls.
Against the overall data layering problem caused by the different precision of each component in the multi-visual structured light measurement system, a compensation method based on spatial interpolation with an error library composed of 3D point clouds is proposed. First, the corresponding relationship between each monocular structured light system and the reference binocular structured light system is established by the unique code value, which is determined by the orthogonal coded fringe patterns projected by different systems. And an error library is constructed by comparing the measuring coordinate values of datum points in different measurement systems. Then an Inverse Distance Weighted method (IDW) based on the K-D tree neighborhood is proposed to complete the error compensation of measuring points in the measurement space, so as to improve the data quality of the whole system after complementary fusion. Different from the traditional error compensation method, this paper focuses on the multi-view structured light measurement system, from the point cloud data end for the measurement end compensation, to achieve the comprehensive compensation of complex error. Finally, experimental results show that the proposed method has outstanding effect and practicability.
As one of the core components of a turbine, the quality of the blade manufacturing has a strong impact on the energy conversion efficiency of the turbine, where the key technology of quality evaluation of blades is point cloud registration. However, with the application of structured light three-dimensional measurement technology in full profile measurement, the typical point cloud registration methods only focus on the minimization of surface profile error, ignoring the position error relative to reference datum, which can easily lead to the misjudgment of qualified blades. In this paper, a new blade error evaluation method is presented to register the point cloud data scanned from a physical blade to its theoretical CAD model, which fits the two surfaces based on parameter priority. Firstly, qualified blades are quickly selected after global fine registration using the best-fit algorithm. Subsequently, based on the priority of position error parameters, the coordinate descent algorithm combined with the minimum zone criterion is adopted for local fine registration, which guarantees accurate evaluation results. Finally, the shape and position error of the actual blade is obtained accurately by calculating transformation parameters of registration and the deviation between the registered point cloud and its CAD model of the blade. Experimental results show that compared with state-of-the-art registration methods, the presented method gives higher priority to the parameters which are difficult to finish or repair by machining, and the position errors are controlled in the tolerance area, which effectively reduces the misjudgment. In addition, evaluation results of blade errors with the method are mainly reflected in profile, which is valuable for guiding the blade finishing or trimming in practice.
Three-dimensional measurement based on structured light has been widely used in many fields. Since center locations are used for calculating 3D coordinates, it is important for measurement accuracy. However, affected by the occlusion, shape or color of the measurement object, the angle between object and measurement system and so on, the gray distribution of stripe is degenerated from symmetric to asymmetric. Stripe center locating accuracy is decreased by asymmetric, and some measurement data with big error which decreasing the measurement accuracy seriously appears. In order to recognize those large error data, a new method is proposed by evaluating the quality of stripe gray distribution. The asymmetrical degree of stripe gray distribution is evaluated by the skewness coefficient of stripe gray distribution. The skewness coefficient is defined by the third-order central moment. Then the relationship between the skewness coefficient of stripe gray distribution and the stripe center locating error is analyzed and established by statistical methods. Based on the relationship, the threshold of skewness coefficient is set according to the requirement of measurement accuracy. The asymmetry of gray distribution is estimated by calculating the coefficients. According to the skewness of stripe gray distribution and threshold large error data with low reliability are identified. Higher measuring accuracy is achieved by rejecting the identified data. The validity and reliability of the method have been proved by experiments.
The linear translation stages play an important role in computer numerical control machine tools, coordinate measuring machines and semiconductor lithograph equipment. Six geometric motion errors are associated with a precision linear stage. High precision simultaneous measurement of multiple degrees of freedom is essential for the multiple-dimension motion calibration of the ultra-precision linear translation stage. In this paper, a laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulator is proposed. In this optical configuration, a stabilize single-frequency laser (f0) and two acousto-optic modulators are used to generate the laser source. The frequency shifts of the two AOMs are f1 and f2, respectively. The positive first order diffraction beams of two AOMs, f0+f1 and f0+f2, are merged into one orthogonally and linearly polarized beam with a frequency offset of (f1-f2) as the laser source for the roll measurement-unit. A half wave plate (HWP) is utilized as the roll sensing plate to magnify the tiny roll angle into an observable phase shift based on the change of polarization state. The resolution of the roll measurement system is determined by the amplification factor which can be enhanced by a multi-reflection cavity made of a specifically arranged assembly square pyramidal mirror and a folding mirror. The zeroth beam f0 and the positive first order beam f0+f1 provided by two AOMs forms two space separated beams for the displacement measurement, which can eliminate the periodic nonlinearity error. The optical system of the simultaneous measurement of displacement and roll angle were setup. The experimental results showed good repeatability and good consistency.
In fringe projection profilometry, highlight usually causes the saturation and blooming in captured fringes and reduces the measurement accuracy. To solve the problem, a regional-projection fringe projection (RP-FP) method is proposed. Regional projection patterns (RP patterns) are projected onto the tested object surface to avoid the saturation and blooming. Then, an image inpainting technique is employed to reconstruct the missing phases in the captured RP patterns and a complete surface of the tested object is obtained. Experiments verified the effectiveness of the proposed method. The method can be widely used in industrial inspections and quality controlling in mechanical and manufacturing industries.
The roll angle measurement method based on a heterodyne interferometer is an efficient technique for its high precision and environmental noise immunity. The optical layout bases on a polarization-assisted conversion of the roll angle into an optical phase shift, read by a beam passing through the objective plate actuated by the roll rotation. The measurement sensitivity or the gain coefficient G is calibrated before. However, a relative tilt between the laser and objective plate always exist due to the tilt of the laser and the roll of the guide in the field long rail measurement. The relative tilt affect the value of G, thus result in the roll angle measurement error. In this paper, a method for field calibration of G is presented to eliminate the measurement error above. The field calibration layout turns the roll angle into an optical path change (OPC) by a rotary table. Thus, the roll angle can be obtained from the OPC read by a two-frequency interferometer. Together with the phase shift, an accurate G in field measurement can be obtained and the measurement error can be corrected. The optical system of the field calibration method is set up and the experiment results are given. Contrasted with the Renishaw XL-80 for calibration, the proposed field calibration method can obtain the accurate G in the field rail roll angle measurement.
Measuring objects with high dynamic range (HDR) reflectivity by coded structured-light, captured stripes are usually seriously distorted by reflectivity, causing inaccurate measurement results. A stripe enhancement method is proposed to deal with the problem. The method is based on the correspondence between phase and intensity of the stripe. First, the phase map of the captured stripe pattern is retrieved by phase-shift algorithm and multiexposure method, where saturation and low contrast of the stripe are eliminated; then, the modulation of stripes is normalized to eliminate the influence of reflectivity; finally, the enhanced stripe is obtained by assembling the modulation and the phase map. Experimental results demonstrate that the method is efficient for objects with HDR reflectivity and achieves high accuracy.
The coherent noise appears in the constructed image of digital holographic microscopy due to the laser source; thus, the imaging quality is degraded. A method of coherent noise reduction using a laterally shifting hologram aperture is presented. An original hologram with coherent noise is captured by a camera first. A series of holograms are sampled by laterally shifting the digital aperture in the original hologram. Instead of extracting the specimen’s part information, each sampled hologram, which includes the whole specimen, is reconstructed. The coherent noise is reduced by averaging the different reconstructed images. The experiment demonstrates the feasibility of the approach. The presented approach with a single recorded hologram realizes the coherent noise reduction without loss of spatial resolution, which is useful for real-time measurement.
The adaptive spatial filtering method is commonly adopted to extract the +1 term spectrum in digital holography for real-time dynamic analysis. However, the typical filtering method is not satisfactory for automatic analysis, because the reset of the filtering window is needed to extract the area of the +1 term spectrum. Therefore, an adaptive spatial filtering method based on region growing and the characteristic of the spectrum separation is proposed. Its filtering window is automatically formed by region growing. The key parameters, including threshold and seed point, are set by the intensity distribution of the hologram spectrum. Then the adaptive filtering extracting the +1 term spectrum is realized by multiplying the hologram spectrum by the filtering window. Compared to the typical filtering method, the experimental results of a microhole array and a phase step show that the proposed method has better adaptability and a higher precision. Moreover, the applicability of this method for different uses is also demonstrated by experiments with a microhole array and a phase step.
The telecentric arrangement in digital holographic microscopy (DHM), considered to be a pure-physical compensation for defocus aberration introduced by microscope objective (MO), shows shift-invariant behavior. Its optical arrangement requires precise adjustment of the distance between MO aperture stop and collimated lens. However, it is difficult to measure and quantify the distance even by monitoring the spatial frequency spectrum of recorded hologram in the absence of object. Thus the misalignment results in the residual defocus aberration in the telecentric arrangement. The total aberrations compensation for misalignment of telecentric arrangement in DHM is presented, in which a posteriori surface fitting method based on Zernike polynomials is performed to eliminate the residual defocus aberration as well as other primary aberrations. The approach reduces the difficulty in precise alignment of the telecentric arrangement and decreases the measurement error caused by aberrations in construction. Three-dimensional retrieval of the height for micro-hole arrays with high-spatial-frequency content demonstrates the feasibility of the method.
A method for improving the measuring accuracy of structured light measurement system, which adopts projecting stripe pattern to measure the three-dimensional profile, is presented. Based on the evaluation of the reliability of center extraction results, the improvement of accuracy is achieved by identifying and rejecting the stripe center extraction results with large error. Two parameters are used to evaluate the reliability of center extraction results. The first parameter is the average energy of the stripe, which is used to analyze and establish the relationship between the extraction accuracy and the signal-to-noise ratio through a statistical method. The second parameter is the asymmetric degree of the stripe gray distribution which introduces error into the center extraction, and a new method is proposed for measuring the asymmetric degree. Then, the criteria of the data rejection defined by the thresholds are presented, and large error data with low reliability are identified according to the thresholds. Higher measuring accuracy is achieved by rejecting the identified data. The validity of the method has been proved by experiments.
Digital holographic microscopy (DHM) has been widely applied for the topography measurement of microscopic
specimen. A total surface fitting method based on Zernike polynomials is presented to remove aberrations in DHM, in
which Zernike polynomial coefficients enable to provide quantitative measurement of primary aberrations. The phase
free of aberrations is obtained by subtracting out the surface fitting result from the reconstructed phase. The method
carries out the total phase aberrations compensation automatically by only one hologram, instead of knowing the
physical parameters of optical setup and the aberration mathematical model in advance. The optical system of off-axis
DHM is set up and the experiment results are given. Compared with the double-exposure method, the Zernike surface
fitting method obtains better phase information owing to removing residual tilt aberration.
In order to improve the accuracy and efficiency of weld defect segmentation in automatic radiographic nondestructive
testing and evaluation(NDT&E), an effective weld defect segmentation algorithm based on flooding has been developed,
which has the self-adaptive characteristics. Firstly, the defect’s feature points are extracted from the scale space of
radiographic films. Based on the information of defect points, the seed points and seed domains of defect discrimination
are adaptively determined, in which the defect segmentation seed will be searched. Then, aiming at the sparsity of weld
defects and canyon characteristics of 3D topographic map of defect regions, the drip-watering and water flooding have
been used for reference. The flooding is carried out by using line-flooding algorithm, in which water starts from defect
seed points and flows to the neighbor regions in order. On the basis of the flooding-area change and flooding-level
ascending velocity, the defect segmentation threshold values are determined and the weld defects also are segmented
from the radiographic films. At last, the comparative experiments have been carried out to compare the proposed
algorithm with the watershed segmentation algorithm and background subtraction segmentation algorithm. And the
experiment results confirm that the proposed algorithm obviously improves the accuracy and efficiency of weld defect’s
segmentation.
In order to obtain the non-overlapping and high-quality reconstructed image, this paper analyzes the system parameters
in digital holographic microscopy. Nowadays a few scholars have analyzed the system parameters which need to satisfy
the sampling theorem and spectrum separation conditions. In this paper, not only the sampling theorem and spectrum
separation but also the size relationship between the reconstructed plane and the magnified image are studied. Then
relationships of system parameters are proposed. First, the maximum object size is directly proportional to the
wavelength and microscope objective focal length, inversely proportional to the sampling interval. Second, the minimum
magnification is described accurately. Finally, the paper gives the range of recoding distance. Experiments further
demonstrate the proposed conclusion’s validity.
In the structured light three-dimensional measurement system, calibration is the key to the measurement accuracy; however, conventional calibration methods for the projector are either too complex or inaccurate. Therefore, we propose a simple and accurate method to calibrate the projector. In this method, the calibration points in the camera image plane can be mapped to the projector according the homography of the planar projection. In addition, an error surface compensation method is developed to minimize mapping errors caused by lens distortion of the camera and projector. As a result, the projector can be calibrated with the same method as the camera. Experiments are conducted to verify the effectiveness of the proposed method.
In the calibration process of structured light three-dimensional (3D) measurement system, the accuracy of the calibration
points' image coordinates directly influences the system's measurement accuracy. Based on the analysis of errors in
calibration points' image coordinates, mathematical models are built. A solution to eliminate errors in those image
coordinates is proposed according to the further analysis of the models, and calibration points are designed to be circle
for high-precision and steady extraction. The solution contains procedures as following: 1) A novel and real-time
algorithm is proposed, which is used for the correction of the non-uniform intensity in image caused by non-uniform
illumination and the camera's parameters. Taking preliminary extracted elliptical center coordinates and average gray
value of the ellipses as known information, the intensity distribution of calibration images can be obtained by
interpolation. Then the non-uniform intensity of calibration images is corrected in accordance with the interpolation
results. 2) High frequency noise in the images is filtered. 3) At last, error of asymmetric perspective projection is also
compensated based on its model. Simulation and experiment results indicate that this solution can efficiently reduce the
calibration errors.
This paper presents a novel color coding method which is applied to structured light measurement using fringe-pattern
projections. The method is based on time coding, and reduces the projection times of fringe patterns with the same
number of fringes by adding colors into the conventional fringe patterns. But the introduction of colored fringes also
brings a difficulty in image processing, that is color crosstalk. To address this problem, sinusoidal fringe patterns with
four colors of white, red, green and blue are used to project to the measured object surface to reduce the edge effect.
Based on those ideas and methods, a three-dimensional measurement system is built, and the direct linear transform
(DLT) method of calibration with lens distortion corrected by cross ratio invariance principle is used to calibrate the
internal and external parameters of the system. Then the parameters of the system are optimized by the bundle
adjustment method. Finally, a standard metal hemisphere with spraying is measured, and the experimental results show
that with the same times of projection, the lateral measurement resolution is higher than the traditional method, and the
measurement accuracy of the depth direction is about 0.27mm.
As a new holographic display device, TFT-LCD (Thin Film Transistor Liquid Crystal Displays) is key technical component of holographic representation for easy controlled by computer. With the development of exquisite processing technology, that it instead of the traditional holographic plate become historical necessity and would be the development direction of holographic optics. Based on principles of holography and display character of LCD, the property which the LCD was used as a holographic plate was analyzed. The emphasis on discuss influence of LCD black matrix on holographic representation. First, analyzed on LCD pixel structure, the LCD pixel structure mathematical model was established. LCD was character representation by pixel structure parameters. Then, the influence of LCD pixels structure on holographic representation was analyzed by computer simulation. Meanwhile, the SONY LCX023 was chosen for holographic plate, the He-Ne laser which the wavelength is 0.6328um was holographic representation light source. The holographic representation system was established for test influence of LCD on holographic representation. Final, compared between computer simulations and optical experimental results, the mathematical model of LCD was proved to be true. When aperture ratio is 0.625, the holographic representation wouldn't be distinguished between representation images. At the same time, some useful results was acquired for improve application effects of LCD in holographic representation.
Referring to phase-shifting interferometry technology, the phase shifting error from the phase shifter is the main factor that directly affects the measurement accuracy of the phase shifting interferometer. In this paper, the resources and sorts of phase shifting error were introduction, and some methods to eliminate errors were mentioned. Based on the theory of phase shifting interferometry, the effects of phase shifting error were analyzed in detail. The Liquid Crystal Display (LCD) as a new shifter has advantage as that the phase shifting can be controlled digitally without any mechanical moving and rotating element. By changing coded image displayed on LCD, the phase shifting in measuring system was induced. LCD's phase modulation characteristic was analyzed in theory and tested. Based on Fourier transform, the effect model of phase error coming from LCD was established in four-step phase shifting interferometry. And the error range was obtained. In order to reduce error, a new error compensation algorithm was put forward. With this method, the error can be obtained by process interferogram. The interferogram can be compensated, and the measurement results can be obtained by four-step phase shifting interferogram. Theoretical analysis and simulation results demonstrate the feasibility of this approach to improve measurement accuracy.
The aspherical measuring technology that based on computer-generated hologram (CGH) was introduced. The advantage
of this method is that the phase shifts can be controlled digitally, no any mechanical moving and rotating element. By
changing CGH coding which displayed on the Liquid Crystal Display (LCD), the wavefront and phase shifts in
measuring system were induced. Based on the characteristics of aspherical measurement and LCD structure, the CGH
encode technology used in LCD was discussed. Then a new encode method which applied to aspherical measurement
was put forward. In this method, the LCD modulates functions of amplitude and phase was coexistent, and the character
of LCD diffraction frequency spectrum was considered, and phase hologram was applied. This aspherical measuring
technology is more flexible than usual method. In this paper, the hologram encode method based on LCD were
illuminated in detail. In order to verify the correction of encode technology, the aspherical surface with standard
wavefront was generated by coaxial hologram reconstruct system when hologram encode image was displayed on SONY
LCX023 LCD, it interfere with the standard spherical wavefront, then the interferogram was sampled to computer by
Charge Coupled Device (CCD) and A/D transfer, the wavefront of hologram reconstruct was obtained by image process
finally. All calculation is completed by Matlab. An aspherical measuring system based on LCD was built experimentally.
Both the theoretical analysis and experimental results demonstrate the feasibility of this approach.
KEYWORDS: Confocal microscopy, Sensors, Optical fibers, Microscopes, Objectives, Light sources, 3D metrology, Microscopy, Imaging systems, Signal to noise ratio
3-D information becomes more and more important in engineering field. With the advent of miniaturization and the emergence of micromechanics, microdynamics and nanotechnology, 3-D measurement was introduced in confocal technology in recently years because of its high precision, non-contact, and wide field. This paper describes the principle, the characteristics of confocal microscopy. Main conclusions based on Fourier coherent theory are given. According to the conclusions, some key parameters can be selected. In addition, some actual case should be concerned. The paper also gives the practical set-up in the experiment which is designed for surface topography. Experiment results obtained for different conditions are also presented.
A new method based on the principle of broadband-light interference, which combines reflected spectrum analysis and optical fiber techniques, is proposed to measure surface profile of opaque film. The testing system mainly consists of a Michelson interferometer. Incident light is split into a reference beam and an input beam to the sample. When two lights reflected from the surface of film and mirror may interfere within the range of broadband light coherent length, the output of interference patterns is measured by a spectrograph. The optical path difference of the sample point and the reference mirror is tested by analyzing the interference pattern. When the reference mirror is fixed, the relative thickness value of different measuring points on the film's surface is achieved by scanning the film's surface. Its testing range is from 0.2 micron to less than 20 micron. According to the relative thickness data, the film’s surface profile is obtained. The result shows that the testing error of this method is within 2 nm. This method has the advantages over the other measuring method, such as nondestructive, higher accuracy and simple structure.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.