The marriage of optics and MEMS has resulted in a new category of optical devices and systems that have unprecedented advantages compared with their traditional counterparts. As an important spatial light modulating technology, diffractive optical MEMS obtains a wide variety of successful commercial applications, e.g. projection displays, optical communication and spectral analysis, due to its features of highly compact, low-cost, IC-compatible, excellent performance, and providing possibilities for developing totally new, yet smart devices and systems. Three most successful MEMS diffraction gratings (GLVs, Polychromator and DMDs) are briefly introduced and their potential applications are analyzed. Then, three different MEMS tunable gratings developed by our group, named as micro programmable blazed gratings (μPBGs) and micro pitch-tunable gratings (μPTGs) working in either digital or analog mode, are demonstrated. The strategies to largely enhance the maximum blazed angle and grating period are described. Some preliminary application explorations based on the developed grating devices are also shown. For our ongoing research focus, we will further improve the device performance to meet the engineering application requirements.
The polysilicon ohmic contacts to n-type 4H-SiC have been fabricated. TLM (Transfer Length Method) test patterns
with polysilicon structure are formed on N-wells created by phosphorus ion (P+) implantation into Si-faced p-type 4H-SiC
epilayer. The polysilicon is deposited using low-pressure chemical vapor deposition (LPCVD) and doped by
phosphorous ions implantation followed by diffusion to obtain a sheet resistance of 22Ω/square The specific contact
resistance ρc of n+ polysilicon contact to n-type 4H-SiC as low as 3.82×10-5Ωcm2 is achieved. The result for sheet
resistance Rsh of the P+ implanted layers in SiC is about 4.9kΩ/square. The mechanisms for n+ polysilicon ohmic contact to ntype
SiC are discussed.
KEYWORDS: Deformable mirrors, Finite element methods, Mirrors, Testing and analysis, Adaptive optics, Chemical elements, Micromirrors, Temperature metrology, Control systems, Structural design
Effects of residual stresses on mechanical properties such as voltage vs. displacement response, pull-in voltage and structural resonant frequency of segmented micro deformable mirrors were investigated with both finite element method (FEM) and analytical method. A simplified model was adopted to study the structural spring constant on the existence of residual stress and two methods for imposing residual stress on structures were utilized for the purpose. Both results of analytical method and FEM show that larger structural spring constant can be obtained by introducing tensile residual stress. Consequently, mechanical properties relevant to spring constant are also greatly affected. The higher the tensile residual stress is, the stronger the structural stiffness will be. That means in order to induce the same structural displacement of mirror plate as stress-free state, higher voltage is demanded. Meanwhile, with higher tensile residual stress, larger pull-in voltage and greater structural resonant frequency are achieved. For the situation of compressive residual stress, totally the opposite influences can be observed. In conclusion, residual stress (no matter tensile or compressive) can greatly affect the mechanical properties of segmented micro deformable mirrors. Accurate control of it is needed for optimizing the structural design and improving the performance of devices.
In an adaptive-optical (AO) system, the wavefront of optical beam can be corrected with deformable mirror (DM). Based on MicroElectroMechanical System (MEMS) technology, segmented micro deformable mirrors can be built with denser actuator spacing than continuous face-sheet designs and have been widely researched. But the influence of the segment structure has not been thoroughly discussed until now. In this paper, the design, performance and fabrication of several micromachined, segmented deformable mirror for AO were investigated. The wavefront distorted by atmospheric turbulence was simulated in the frame of Kolmogorov turbulence model. Position function was used to describe the surfaces of the micro deformable mirrors in working state. The performances of deformable mirrors featuring square, brick, hexagonal and ring segment structures were evaluated in criteria of phase fitting error, the Strehl ratio after wavefront correction and the design considerations. Then the micro fabrication process and mask layout were designed and the fabrication of micro deformable mirrors was implemented. The results show that the micro deformable mirror with ring segments performs the best, but it is very difficult in terms of layout design. The micro deformable mirrors with square and brick segments are easy to design, but their performances are not good. The micro deformable mirror with hexagonal segments has not only good performance in terms of phase fitting error, the Strehl ratio and actuation voltage, but also no overwhelming difficulty in layout design.
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