Magnetorheological polishing technology is a new type of ultra-precision processing technology. It has many advantages such as no sub-surface defects, easy realization of numerical precision control, high machining accuracy, and high polishing efficiency; and its small removal function size makes it very suitable for processing optical elements with complex geometric structures. It has been widely used in phase optical processing. In order to realize the processing of phase optical elements with a small space periodic structure, a smaller removal function is required. The traditional magnetorheological fluid circulation system structure is difficult to achieve stable control of the magnetorheological fluid flow under small flow conditions. Therefore, it is difficult to obtain a stable small size removal function. This paper analyzes the characteristics of the peristaltic pump, and aiming at the problem of strong pulse in its output flow; uses a pulsation damper and a variable-diameter back pressure pipeline to eliminate the flow pulse, realizes the stable and smooth output of the peristaltic pump flow. On this basis, this paper proposes a new type of magnetorheological fluid circulation system structure, which realizes the stable control of the flow rate under small flow rate conditions. The magnetorheological fluid flow fluctuation error of the magnetorheological fluid circulation system was from more than 25% reduced to less than 2%, realizing high stability control of magnetorheological fluid flow. Use small size removal function to process Continuous Phase Plates (CPP) with large depth and small periodic structure. The CPP is designed with a PV of 5μm and a minimum space period of 3mm. After processing, the residual error RMS of the CPP from 830nm converges to 24.5nm, realize high-precision processing of phase components with large depth and small structure.
For lens-free imaging technology based on axial multi-plane phase retrieval, the test parameters have a very important impact on the image reconstruction speed and quality. The deviations between the actual position of the recorded diffraction intensity pattern and the set position in the reconstruction algorithm will also affect the image reconstruction quality. We analyzed the influence of test parameters and deviations on the reconstruction accuracy and proposed a method to correct the position mismatch of the intensity image. The effectiveness of the method is verified by simulation and experiment.
Traditional optical processing technology is limited by factors such as the geometric size and stability of the removal function of the processing equipment, and it is very difficult to process optical elements with complex structures with large depths and small periods. In particular, the high-efficiency and high-precision processing of optical elements with complex structures whose depth is micron-level and space period is millimeter-level has always been a technical difficulty. This paper proposes a method for processing optical components with complex structures based on magnetorheological polishing technology, focusing on solving the traditional magnetorheological polishing technology small size removal function generation and stable control problems, and obtaining small size removal with stable removal efficiency and morphology function. The magnetorheological fluid circulation system is a key component of the magnetorheological polishing machine. The structure of traditional magnetorheological fluid circulation system is difficult to match the stable transmission of magnetorheological fluid under small flow conditions. This paper proposes a method of dual peristaltic pump & pulsation damper combined with variable-diameter back pressure pipeline to achieve the stability of magnetorheological fluid control. The flow fluctuation error of magnetorheological fluid is reduced from 10-40ml/min to 1-5ml/min. The diameter of the polishing wheel of the machine is 20mm and the flow rate of the magnetorheological fluid is 200ml/min. A two-dimensional sinusoidal surface processing was performed using magnetorheological machine. Sinusoidal surface design PV=1.0λ (λ=632.8nm), RMS=159.5nm, the space period is 3mm, the element size is 50mm×50mm. The width of removal function is 1.33mm, FWHH (Full Width at Half Height) is 0.98mm, and volume removal rate is 0.004mm 3/min. After the element is completed, the residual RMS is reduced from the original 159.5nm to 15.7nm, and its convergence rate is 90.1%, with high convergence accuracy. The experimental results show that the configuration of the magnetorheological fluid circulation system proposed in this paper realizes the generation and stable control of the small size removal function and finally realize the fabricating of phase components with a minimum space period of 3mm.
The continuous phase plate with a large wavefront gradient is used as the far-field beam shaping element in some highpower laser physics experiments. During the fabrication of continuous phase plate and before the actual use, it is necessary to measurement its wavefront to judge the fabrication quality and whether the wavefront distribution meets the requirement of use. By constructing a novel amplitude replacement phase retrieval algorithm with variable weighting factor, fast and high precision reconstruction of CPP with large wavefront gradient can be achieved. The proposed method is validated by numerical simulation and experiment.
In the interference test process of a parallel flat optical element, the light beam after multiple reflections on the front and rear surfaces of the element with the wavefront to be measured often cause multi-surface interference, forming spurious fringes on the interferogram, which will introduce large errors to the wavefront measurement. Spurious fringes mainly have a great impact on the parameters such as wavefront gradient root mean square (GRMS) and mid-spatial-frequency power spectral density (PSD). The RMS value of the wavefront containing spurious fringes is generally significantly larger than the true value, which will affect the accurate measurement and evaluation of the wavefront quality of optical components. Existing spurious fringes suppression methods often have the disadvantages of multiple adjustment steps in the test process or high hardware requirements, and it is difficult to match the requirements for rapid and high-efficiency test of high-precision optical flat components. This paper proposes a method for removing spurious fringes in interference test based on characteristic spectrum band-stop filter, which can achieve accurate removal of spurious fringes. First, by using the ZoomFFT algorithm to zoom up the spectrum of the wavefront data points, the effective identification of the spectral characteristics of the spurious fringe is realized; then the band-stop filter in a specific area is used according to the spectral characteristics of the spurious fringes, only the frequency spectrum of the spurious fringes is removed, and the wavefront data of the component to be tested is completely retained without changing its own shape; the Quad-Flip operation and error function filter window are used for spectrum filtering, which effectively reduces Gibb's noise in the frequency domain due to the sudden truncation of the input data edge during FFT transformation. The transmitted wavefront of a fused silica element with a diameter of Φ100mm was tested on the ZYGO static interferometer, and the test results contained a large number of spurious fringes. After processing by this method, the spurious fringes were removed. The mid-spatial-frequency wavefront RMS of the component is reduced from 5.365nm to 3.678nm. The method does not need to add additional hardware and tedious measurement and adjustment operations, the calculation is fast, and the spurious fringes removal is accurate.
In order to measure the aspherical transmission wavefront of large aperture optics with wedged angle, three compensators were fabricated based on theories of geometrical and diffraction optics, a single null lens and two computer-generated-holograms (CGH) by different frequecy carrier. The results show that both refraction null compensator and diffraction plate can achieve high-precision wavefront measurement of large aperture aspherical optics, the difference of wavefront measured by refraction and diffraction methods is better than 0.01λ(RMS) in the effective aperture area. Because of the measure beam deviation caused by the optic wedge, the results is very sensitive to parts position and gesture. Due to a smaller divergence angle and extra alignment/fiducial area for precision adjustment, the primary aberrations of tilted CGH measurment can get a better control than that of null compensator. Precise control or adjustment of compensator is critical for aspherical wavefront measurement. Null compensator lens can easily induce regulation error while CGH method could cause mid-frequency disturbance.
The fully continuous spiral phase plate (SPP) has been used more and more widely in high-power laser and other fields. Its unique jump cross section structure with a width of only a few millimeters puts forward extremely high requirements for wavefront measurement. In this paper, a defocus multi-intensity phase retrieval algorithm based on weighted GS for wavefront measurement of SPP is proposed, and the influence of phase retrieval test error on measurement accuracy is analyzed. Finally, a phase retrieval test platform is established, and the high-precision phase retrieval measurement of the SPP wavefront is realized.
Due to the characteristics of large depth, small period and high steepness, phase optical elements with complex structure need to use a small size removal function in magnetorheological processing, and use very small line spacing and step size values when planning the polishing path,so the dwell time matrix is very large, and the dwell time calculation speed is slow; besides, because of the complicated phase optical profile, it is difficult to achieve high-precision convergence of the dwell time. This paper proposes a fast and high-precision numerical iterative dwell time algorithm for complex structure phase optical elements. this paper proposes the concept of the dwell point matrix, which realizes the methods of the FFT convolution multi-core parallel algorithm to calculate the dwell time in the entire iterative calculation process. Also, to achieve high-precision convergence of the dwell time calculation, this paper proposes a calculation rule based on machine dynamic performance matching, when calculating the dwell time, the speed, acceleration, and speed smoothness of the machine were matched with the performance of the magnetorheological machine, which improves the stability of the machine. A large-diameter Continuous Phase Plate (CPP) is processed on a magnetorheological machine. The shape of the CPP contains a random structure of various periods. The initial RMS = 228.07nm, the CPP data matrix size is 2424 × 2424, and the line spacing is 0.6mm, the dwell time is calculated using the algorithm described in this article, the entire calculation process takes only 4.2 seconds, the calculation speed is about 3 times faster than the traditional iterative methods, the CPP residual error RMS converges to 10.2nm; After the CPP processing is completed, the CPP actual residual error RMS is reduced from the original 228.07nm to 15.6nm, and its convergence rate is 93.1%, which shows that the algorithm has high calculation efficiency and convergence accuracy.
As a computational imaging method, phase retrieval has wide applications in image reconstruction, wavefront detection, image encryption, etc. It is an image-based wavefront sensing technique and compared with some other traditional measurement methods such as interferometry, phase retrieval has the advantages of easy operation, high accuracy and strong adaptability to the environment. Conventional phase retrieval algorithms, such as the Gerchberg–Saxton (GS) algorithm, retrieve wavefront by iterative calculation. But limited by finite information of the captured diffractive light filed, the calculation process is easy to fall into local minimum value and stagnation occurs in practical, making it unable to converge to the right wavefront. In this paper, in order to improve this phenomenon, a phase retrieval method combined with the zone plate is proposed in this paper. In this method, zone plates are added into the traditional iterative phase retrieval algorithm to modulate the incident wavefront and combined with the multi-focus property, it can collect more effective information about the wavefront in a single optical intensity distribution image and realize a better wavefront reconstruction result. Simulation results indicate that by taking zone plates into calculation, more effective reconstruction results can be acquired. On the one hand, the recovery residual is smaller compared with conventional lens. On the other, although all of these methods reach to a stagnation, zone-plate-based methods are more efficient to get a better result.
The fully continuous spiral phase plate (SPP) can produce high quality vortex beams, which has important application value in the field of high-power lasers. For the stitching test of large aperture SPP with large gradient characteristics, the error factors that affect the accuracy of stitching are analyzed, and the corresponding error correction methods are proposed. On the basis, the stitching test of 235 mm×175 mm aperture SPP is achieved. Multiple test results indicate that the RMS repeatability of stitching is up to 0.0016 λ and the RMS accuracy can reach 4.52 nm.
Spiral phase plate (SPP) for generating vortex hollow beams has high efficiency in various applications. However, it is difficult to obtain an ideal spiral phase plate because of its continuous-varying helical phase and discontinued phase step. This paper describes the demonstration of continuous spiral phase plate using filter methods. The numerical simulations indicate that different filter method including spatial domain filter, frequency domain filter has unique impact on surface topography of SPP and optical vortex characteristics. The experimental results reveal that the spatial Gaussian filter method for smoothing SPP is suitable for Computer Controlled Optical Surfacing (CCOS) technique and obtains good optical properties.
The test of wavefront of large aperture continuous phase plate(CPP) is difficult to obtain by whole aperture once because
of CPP’s characteristic such as large phase depth and large phase gradient,so sub-aperture stitching technique is often
used to test the CPP’s wavefront in whole aperture.We analysed some problems in the traditional sub-aperture stitching
test and put forward a new stitching model mathematically in order to improve the precision in CPP’s sub-aperture
stitching test.We have found that this new model is available by a serial experiments.
The design and manufacure of Continuous Phase Plate(CPP) with a large aperture is very significant and useful to the
Inertial Confinement Fusion(ICF) and some physical experiment related due to its several advantages such as high
energy availability ratio and easily controllable focal spot's profile. Various processing errors will be inevitably
introduced for the limitation of the fabrication technique and hence produce aberrated laser wavefront, which is very
influential for the process of beam's propagation and focusing. In this paper we numerically simulate and compare the
optical filed distributions of phase-aberrated super-Gaussian beam passing through both designed and manufactured CPP
with a large aperture and deep phase. The simulation results prove the CPP's beam smoothing performance and high
tolerance of the super-Gaussian beam's far-field focal plane intensity distributions,which has been added by the random
phase screen, furthermore, the modulation influence of intermediate frequency phase error to the near-field light intensity
distribution has also been simulated and proved, from which we can improve the fabrication technique and optimize the
design method.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.