Laser-interference dilatometry method for the investigation of thin-film structures mechanical stability

M. L. Trunov; A. G. Antchugin; N. D. Savtchenko; V. M. Rubish

doi:10.1117/12.191989

31 October 1994 Laser-interference dilatometry method for the investigation of thin-film structure mechanical stability

M. L. Trunov, A. G. Antchugin, N. D. Savtchenko, V. M. Rubish

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.191989
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

The perfection of vacuum technology of thin film structure production of different functional applications is to a great extent defined by the technical level of the devices for investigation of mechanical properties of thin films. Improvement of operational characteristic features of film structures is restrained by lack of mechanical stability which in its turn is considerably influenced by the level of internal macro- and microstresses. In this paper the method and device for thin films mechanical stability investigation are presented and the examples of PbF₂ and As₂S₃ coatings are furnished.

Citation Download Citation

M. L. Trunov, A. G. Antchugin, N. D. Savtchenko, and V. M. Rubish "Laser-interference dilatometry method for the investigation of thin-film structure mechanical stability", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.191989

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