Repair of x-ray multilayer optics by use of overcoating techniques

Ralph F. Pombo; Peter J. Biltoft

doi:10.1117/12.193135

11 November 1994 Repair of x-ray multilayer optics by use of overcoating techniques

Ralph F. Pombo, Peter J. Biltoft

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193135
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

In an era of rigid budget controls and limited resources, the efficiency of coating operations is of great concern. With expenditure reduction in mind, an investigation was initiated into the costly materials and procedures necessary in the production of X-ray optics. The expense of certain specialty substrates required us to evaluate the feasibility of a substrate recycling program. Substrate reuse could reduce initial cost and save acquisition time. Past research in this area centered mainly on stripping or resurfacing optics. Although this has been proven to be successful, it is time consuming and unsatisfactory for figured optics. One solution to this problem is to simply overcoat the optic with a new multilayer coating. If it could be demonstrated that there were no adverse effects to the performance of the optic, then the efficiency gains to both time and budget would be evident. Also worth of investigation, would be to explore the minimum thicknesses that are needed for proper masking of past multilayer coatings. In this paper we seek to examine these points and to determine which parameters of the x-ray overcoatings could adversely effect the performance. By exchanging coating elements, their thickness, and their composition we will demonstrate that there is not degradation of reflectivity. Included will be research substantiated by scanning electro microscope, and Mg-K(alpha) X-ray diffraction.

Citation Download Citation

Ralph F. Pombo and Peter J. Biltoft "Repair of x-ray multilayer optics by use of overcoating techniques", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Multilayers

Reflectivity

X-ray optics

Semiconducting wafers

Coating

X-rays

Silicon

Show All Keywords

Keywords/Phrases

Search In:

Publication Years