Miniaturized surface-driven electrostatic positioners

Robert X. Gao; Ji Fang; Robert O'Neil Warrington Jr.

doi:10.1117/12.228649

18 December 1995 Miniaturized surface-driven electrostatic positioners

Robert X. Gao, Ji Fang, Robert O'Neil Warrington Jr.

Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228649
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

A series of millimeter-sized, addressable linear and rotary surface-driven electrostatic positioners are currently being designed and fabricated. The major components of these positioners are a thin copper-coated glass epoxy stator board and a carbon-coated polymer film slider which is placed on top of the stator board. Using modified Printed Circuit Board technique, a group of conductive electrodes are linearly or radially arranged on the stator board. On application of an excitation voltage pattern to the stator electrodes, a mirror image of the stator electrical charges will be induced on the film slider. Sequential switching of the voltage pattern will lead to electrical charge interactions, resulting in continuous motion of the film slider. Compared to the electromagnetic counterparts, these electrostatics-based positioners do not require the conventional mechanical assembly of transmission gears and rails for operation, thus are compact in design and light in weight. The potential advantage of low manufacturing cost may help this new type of positioners find a wide range of industrial, military, and commercial applications.

Citation Download Citation

Robert X. Gao, Ji Fang, and Robert O'Neil Warrington Jr. "Miniaturized surface-driven electrostatic positioners", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); https://doi.org/10.1117/12.228649

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