3D microscope using diffraction grating

Thomas DeWitt; Douglas A. Lyon

doi:10.1117/12.230381

19 January 1996 3D microscope using diffraction grating

Thomas DeWitt, Douglas A. Lyon

Proceedings Volume 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology; (1996) https://doi.org/10.1117/12.230381
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

An optical microscope has been adapted for 3-D inspection of small capillaries in thread spinnerets by placing a diffraction grating between the microscope objective and the specimen. We show how a grating was specified using a quantitative analysis of groove spacing and geometry. An illumination system was specified based on incident angle and light wavelength. Specimens are placed on a robotic stage for positioning, and repositioning affords multiple perspective views of the target depending upon the diffraction order visible to the objective.

Citation Download Citation

Thomas DeWitt and Douglas A. Lyon "3D microscope using diffraction grating", Proc. SPIE 2599, Three-Dimensional and Unconventional Imaging for Industrial Inspection and Metrology, (19 January 1996); https://doi.org/10.1117/12.230381

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