Paper
7 July 1997 Overlay measurements and edge detection methods
Alexander I. Zaslavsky
Author Affiliations +
Abstract
In order to perform an overlay measurement, one must use some edge detection method. Different edge detection methods have different sensitivity to noise. We define a large class of edge detection methods, and find in this class the methods least sensitive to noise. We consider continuous as well as discrete signals, and use different assumptions about the nature of noise.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander I. Zaslavsky "Overlay measurements and edge detection methods", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275928
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KEYWORDS
Sensors

Overlay metrology

Aluminum

Edge detection

Interference (communication)

Convolution

Precision measurement

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