Development of next generation excimer lasers for industrial applications

Vladimir M. Borisov; Andrei I. Demin; Anatoli V. Eltsov; Oleg B. Khristoforov; Yuriy B. Kiryukhin; Alexander V. Prokofiev; Aleksandr Yu. Vinokhodov; V. A. Vodchits

doi:10.1117/12.518066

6 October 2003 Development of next generation excimer lasers for industrial applications

Vladimir M. Borisov, Andrei I. Demin, Anatoli V. Eltsov, Oleg B. Khristoforov, Yuriy B. Kiryukhin, Alexander V. Prokofiev, Aleksandr Yu. Vinokhodov, V. A. Vodchits

Author Affiliations +

Proceedings Volume 5137, International Conference on Lasers, Applications, and Technologies 2002: Advanced Lasers and Systems; (2003) https://doi.org/10.1117/12.518066
Event: International Conference on Lasers, Applications, and Technologies 2002, 2002, Moscow, Russian Federation

Abstract

The report reviews the results of developments of the perspective excimer lasers which has been carried out in Pulsed Laser System Laboratory at TRINITI. We present parameters of XeCl laser (λ=308 nm) with average power up to 500 W and ArF laser (λ=193 nm) with a pulse repetition rate ≥6 kHz.

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Vladimir M. Borisov, Andrei I. Demin, Anatoli V. Eltsov, Oleg B. Khristoforov, Yuriy B. Kiryukhin, Alexander V. Prokofiev, Aleksandr Yu. Vinokhodov, and V. A. Vodchits "Development of next generation excimer lasers for industrial applications", Proc. SPIE 5137, International Conference on Lasers, Applications, and Technologies 2002: Advanced Lasers and Systems, (6 October 2003); https://doi.org/10.1117/12.518066

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