Error analysis and correction of grating interference displacement measurement system

Minlan Jiang; Xinchao Lu; Xiaodong Wang; Xiuling Xu

doi:10.1117/12.2014881

31 January 2013 Error analysis and correction of grating interference displacement measurement system

Minlan Jiang, Xinchao Lu, Xiaodong Wang, Xiuling Xu

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875950 (2013) https://doi.org/10.1117/12.2014881
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Main error source, error characteristics and its correction method have a detailed analysis of the grating interference displacement measuring system in this paper. Through the error separation and compensation method, its system error is modified. Random error is separated through frequency spectrum analysis method. Experimental results show that, the system accuracy can be improved from micron or submicron magnitude to nanometer level by these error correction methods. This system can realize nanometer level measurement.

Citation Download Citation

Minlan Jiang, Xinchao Lu, Xiaodong Wang, and Xiuling Xu "Error analysis and correction of grating interference displacement measurement system", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875950 (31 January 2013); https://doi.org/10.1117/12.2014881

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