Dr. Allen Stock Profile

Dr. Allen Stock

Product Manager at Stock Systems

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Publications (1)

Proceedings Article | 25 August 1997 Paper

Evaluation of model predictive control in run-to-run processing in semiconductor manufacturing

James Mullins, W. Campbell, Allen Stock

Proceedings Volume 3213, (1997) https://doi.org/10.1117/12.284636

KEYWORDS: Process modeling, Control systems, Semiconducting wafers, Chemical mechanical planarization, Data modeling, Device simulation, Polishing, Process control, Semiconductor manufacturing, Manufacturing

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