Dr. Chidubem Arthur Nwokoye Profile

Dr. Chidubem Arthur Nwokoye

at George Washington Univ

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Publications (1)

Proceedings Article | 20 October 2006 Paper

A new critical dimension metrology for chrome-on-glass substrates based on S-parameter measurements extracted from coplanar waveguide test structures

Chidubem Nwokoye, Mona Zaghloul, Michael Cresswell, Richard Allen, Christine Murabito

Proceedings Volume 6349, 634946 (2006) https://doi.org/10.1117/12.686706

KEYWORDS: Waveguides, Capacitance, Critical dimension metrology, Metrology, Dielectrics, Cadmium, Photomasks, Scanning electron microscopy, Bridges, Molecular bridges

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