Fangrui Wu
at Shanghai Huali Integrated Circuit Corp.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Proceedings Volume 12053, 120531U (2022) https://doi.org/10.1117/12.2613633
KEYWORDS: Lithography, Semiconducting wafers, Process control, Inspection, Fin field effect transistors, Optical alignment

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